Special Session 1: ODEs and Applications

Asymptotic properties of step bunching in epitaxial growth with elasticity effects

Aaron Yip
Purdue University
USA
Co-Author(s):    Tao Luo, Yang Xiang
Abstract:
In epitaxial thin film growth, elasticity effects often lead to self-organizing pattern formation which can be important in the fabrication of nano-structures. We discuss an elasticity model that takes into account of the lattice misfit between the substrate and the film, and the broken-bond effect due to surface steps. The former is an attractive while the latter is a repulsive interaction. It is found that uniform step train is unstable and will evolve into structures consisting of macroscopic step bunches. For the case of vicinal surface which consists of a sequence of monotonically decreasing steps, using a variational formulation, we analyze the properties of these bunches, notably their energy scaling and bunch width. We emphasize on a discrete model but continuum description will also be discussed.